Scanning electron microscopy and related techniques in application to materials characterization

The Scanning Electron Microscopy (SEM) supported with the Energy-Dispersive X-Ray Spectrometry (EDS) and Electron Backscatter Diffraction(EBSD) is considered as a common technique in characterization of structural properties and composition of materials. When combined with Focused Ion Beam (FIB) technology may be used for FIB-TEM sample preparation, patterning of complex structures and sectioning for high-resolution imaging.

The lecture aims to present the possibilities offered by the use of the scanning electron microscopy and related techniques in the field of material research. For this purpose, the theoretical basis of SEM imaging will be briefly discussed and followed by a number of application examples of SEM, EDS EBSD and FIB obtained during the studies of various materials. Special attention will be focused on the application of low-kV SEM.