Applications and limitations of energy dispersive spectroscopy (EDS) in the SEM – optimizing quantitative analysis and mapping

In this presentation we will discuss the SEM instrument parameters such as overvoltage and beam current on the minimum detection limit and EDS spectrum statistics with reference to peak identification (qualitative analysis). The statistical limitations of spectrum count rate on the precision and accuracy of quantitative analysis will be discussed. Finally, the applications, limitations as well as conditions to achieve “true” quantitative elemental mapping will be presented. The entire presentation will be presented in terms of the ISO standards for the EDS technique.